DESCRIPTION:
There is an urgent need for surface protection
of silicon used in MEMS, as well as elimination
of hermetic packaging. For this purpose,
ceramic/organic bilayer coatings have been
developed for silicon and organic surfaces
through novel processing techniques and
micro structural design to make them more
reliable. Both organic and inorganic (ceramic)
coatings have their own advantages and disadvantages
due to their intrinsic materials properties
and processing capabilities. Our bilayer
coatings, consisting of top ceramic and
underlying organic coatings, utilize the
advantages of each individual coating layer
while self-compensating for the weaknesses
to promote a synergistic effect.
POTENTIAL APPLICATIONS:
All applications of MEMS technologies in
which there is a requirement for the given
device to operate in isolation from given
surrounding environment, as well as microelectronics
used in harsh environments.
ADVANTAGES:
-
Provides organic (plastic) package
protection from adverse environmental
conditions without the need for hermetic
encapsulation.
-
Provides MEMS structures with protective
coatings that eliminate the need for
hermetic sealing.
-
Bilayer coating approach provides
for lower moisture/ion permeation, higher
temperature capability, improved wear
resistance, extended storage life, reduced
surface contamination, reduced processing
temperature, and significantly reduced
cost of manufacture.
DISADVANTAGES:
May require additional processes for depositing
the coatings on complex surfaces.
PATENT STATUS:
US Patent 7,282,254, Surface Coating for Electronic Systems
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